FIB-SEM
The FIB-SEM facility in the Department of the Geophysical Sciences at the University of Chicago features a TESCAN LYRA3 field-emission scanning electron microscope (FESEM) with a focused ion beam (FIB).
Figure: The LYRA3 at the University of Chicago.
SEM
The SEM can operate at high vacuum for conducting samples or coated insulators and at low vacuum for insulating samples, and is equipped with the following detectors and other capabilities:
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Everhart-Thornley secondary electron (SE) detector, for topographic imaging at high vacuum
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Scintillator-type backscattered electron (BSE) detector, for compositional imaging at low and high vacuum
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In-column SE detector for high resolution topographic imaging
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In-column BSE detector for high resolution compositional imaging
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Scanning transmission electron microscopy (STEM) detector with bright-field and dark-field capability
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Beam deceleration for high resolution imaging at low incident electron energy
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Two Oxford Instruments X-Max-80 silicon drift x-detectors (SDD), for rapid chemical mapping and quantitative chemical analysis
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An Oxford Instruments Wave 500 wavelength-dispersive spectrometer (WDS) for low-concentration chemical analyses
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An Oxford Instruments NordlysMax2 electron backscatter diffraction (EBSD) detector for determination of crystal structures and study of textures
SEM applications
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High and low resolution imaging (cm- to nm-size)
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Chemical analysis and chemical mapping
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Structural analysis by EBSD or TKD (Transmission Kikuchi Diffraction)
Figure: Example of a BSE image and elemental maps obtained with the LYRA3 and Oxford instruments EDS detector at the University of Chicago (modified from Kööp et al., 2016).
FIB
The LYRA3 is equipped with a Cobra liquid metal ion gun that emits a focused beam of gallium ions. The current of the gallium beam can be varied between ~30 nA and <1 pA. It is currently used for milling, imaging, and controlled deposition of carbon and platinum. The latter is achieved using an Oxford Instruments OmniGIS II gas injection system. An Oxford Instruments OP-400 micromanipulator can be used to lift out small milled samples. The OmniGIS II is currently set up for carbon and platinum deposition, but can also be equipped for deposition of tungsten, and for enhanced milling with reactive gases (XeF2 for SiO2 and H2O for carbon).
FIB applications
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TEM sample preparation
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Tomography
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Manipulation of small samples (controlled isolation or removal of material, controlled deposition of carbon and platinum)
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Enhanced lateral resolution of EDS analyses using thinned specimens
Want to use the FIB-SEM?
We welcome users from within and outside of the university. Rates are $75/hr for academic users, with additional charges for user assistance. We offer training, operator-assisted and independent use of the instrument. Contact us at FIBSEM-manager@uchicago.edu for more details or to schedule a session.
FIB-SEM sign-up for registered users
FIB-SEM sign up calendar, "SEM
sign up", and wet lab calendar,
"upstairs". Please sign up for
time--use the "Google" button at the bottom
right of the calendar. Make sure to select
the SEM calendar when you create an SEM event,
otherwise it may just end up on your
calendar. Refresh this page to get the
latest postings. If you can not make it,
please remove your sign up. Also, you are
welcome to "walk on" if the instrument is
free--but please sign up on web calendar. We do
not want to have other users sign up for time in
the middle of your run. Please use the comment
section to note exact SEM usage times and
comments. Also note room # for "upstairs"
and if anyone else is in the lab.
Note: you'll need to be a registered user
before you will be able to sign up for time.
IF "upstairs" does not show, you should
still be able to log in to your Google
calendar account and add times.
To transfer data: U of C
Outlook or Gmail; U of C
Google Apps, e.g. Drive; U of C Box
Click
here for .zip file for SEM, FIB, and EDS
notes; Cameca std. image,
values,
& cards;
The
University of Chicago Classes (Canvas)
"call me
Al"
Please sanitize or wash your hands before/after
using equipment--thanks. Sink in back
corner of lab, trash can in hallway.